| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a remote control method and system of a sample capable of adapting to an operating feeling from a remote place. Ž<P>SOLUTION: The system includes: a personal computer 1 installed at an electron microscope side as well as a personal computer 2 installed at a remote place side; a network 3 for connecting between the personal computers; a pulse generator 10 connected to the personal computer 2 at the remote place side for generating pulses in accordance with a movement volume; a pulse counting circuit 11 for converting an output of the pulse generator into a count rate; a count rate sending means sending the converted count rate to the network 3; a count rate receiving means fitted at an electron microscope side, a pulse generating circuit 20 for converting the received count rate into pulses; and a driving means 6 for entering the converted pulses to a motor drive control circuit 4 for driving a sample stage of the electron microscope with an output of the motor drive control circuit. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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