发明名称 |
GROUND STRAP AND MANUFACTURING METHOD OF IT |
摘要 |
PURPOSE: A ground strap and a method of manufacturing the same are provided to prevent a process failure by pressing a particle which is generated from chemical reaction with fluorine. CONSTITUTION: A ground strap and a method of manufacturing the same are composed of a body and an aluminum layer. The body(10) is made of hastelloy. The aluminum layer(20) is coated on the circumference of the body. The aluminum layer has an inlet diameter of 2-7 micron and is formed by twice thermal spray coating.
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申请公布号 |
KR20090119341(A) |
申请公布日期 |
2009.11.19 |
申请号 |
KR20080045314 |
申请日期 |
2008.05.16 |
申请人 |
WHANG, SUK SUNG |
发明人 |
WHANG, SUK SUNG;KO, KWANG LO |
分类号 |
H01L21/205;G02F1/13 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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