发明名称 GROUND STRAP AND MANUFACTURING METHOD OF IT
摘要 PURPOSE: A ground strap and a method of manufacturing the same are provided to prevent a process failure by pressing a particle which is generated from chemical reaction with fluorine. CONSTITUTION: A ground strap and a method of manufacturing the same are composed of a body and an aluminum layer. The body(10) is made of hastelloy. The aluminum layer(20) is coated on the circumference of the body. The aluminum layer has an inlet diameter of 2-7 micron and is formed by twice thermal spray coating.
申请公布号 KR20090119341(A) 申请公布日期 2009.11.19
申请号 KR20080045314 申请日期 2008.05.16
申请人 WHANG, SUK SUNG 发明人 WHANG, SUK SUNG;KO, KWANG LO
分类号 H01L21/205;G02F1/13 主分类号 H01L21/205
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