METHOD AND SYSTEM FOR CALIBRATING A ROTARY ENCODER AND MAKING A HIGH RESOLUTION ROTARY ENCODER

摘要

A calibration system for a rotary encoder comprises a rotary encoder disposed on a manufacturing substrate, the rotary encoder including an encoder pattern. The calibration system also includes a calibration pattern written onto a surface of the substrate, the calibration pattern comprising a ring that includes a grating pattern, where a radial position of the grating pattern corresponds to an error value of the position of the encoder pattern. A method of calibrating the errors of a rotary encoder and a method of fabricating a high resolution rotary encoder on a surface of a manufacturing substrate are also provided.