发明名称
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a handling jig in which a body to be handled can be moved easily and precisely. <P>SOLUTION: The handling jig 1 for holding a photomask substrate 10 comprises a grip 2, a lever 3 fixed rotatably to the grip 2, a fixed arm 4 fixed to the grip 2, and a rotary arm 5 fixed to the lever 3 wherein the fulcrum of the weight balance of the handling jig 1 in a state of holding the photomask substrate 10 is set at the end of the grip 2 on the side of a body to be handled. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP4369337(B2) 申请公布日期 2009.11.18
申请号 JP20040288770 申请日期 2004.09.30
申请人 发明人
分类号 H01L21/677;B25B9/00;B65G49/06 主分类号 H01L21/677
代理机构 代理人
主权项
地址