APPARATUS FOR INSPECTION OF SEMICONDUCTOR DEVICE AND METHOD FOR INSPECTION USING THE SAME

摘要

An in-tray inspection apparatus of a semiconductor device is provided to reduce an inspection error by synthesizing a plurality of images from which a shadow image is removed and by comparing the synthesized image with a reference image. An illumination part(15) is composed of at least two illumination apparatuses. The illumination apparatuses sequentially turn on or off according to a control signal of a control part to irradiate light at a predetermined angle with respect to the upper surface of the semiconductor device. An image part takes a picture of at least two images reflected from the surface of a semiconductor device according to selective illumination of the illumination part. An image process part removes shadow images photographed by the image part and synthesizes the shadow image from which the shadow image is removed so that a single image is formed. An image inspection part compares the single image synthesized by the image process part with a reference image to determine whether a defect exists. First to four illumination apparatuses are formed in the right, left, front and rear directions(R1,R2) of the semiconductor device.