发明名称 DEVICE FOR REMOVING BUBBLE AND SYSTEM FOR CIRCULATING CHEMICAL LIQUID
摘要 An apparatus for removing air bubbles is provided to precisely measure the density of chemical liquid by effectively removing air bubbles from liquid passing through a circulation line. A body includes a chamber having an inlet and an outlet wherein the chamber is connected to a circulation line(130) through the inlet and the outlet. An exhaust part is formed on the body. A partition wall is formed in the chamber so that the liquid detours from the inlet to the outlet. The ceiling of the chamber connected to the exhaust part is partially concave.
申请公布号 KR20080088780(A) 申请公布日期 2008.10.06
申请号 KR20070031507 申请日期 2007.03.30
申请人 K.C.TECH CO., LTD. 发明人 LEE, TAE WOO
分类号 H01L21/00;H01L21/304;H01L21/3063 主分类号 H01L21/00
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