发明名称 SERVER DEVICE, INFORMATION PROCESSING METHOD, AND PROGRAM
摘要 <p>[PROBLEMS]To enable easy management of information on authority.[MEANS FOR SOLVING PROBLEMS]A server device (10) includes: an authority information storage unit (11) for storing authority information concerning authority for processing; a judgment request information reception unit (12) which receives judgment request information requiring a permit/reject judgment concerning execution of a desired process, which request is transmitted from a manufacturing device (40) for performing a predetermined semiconductor process on a substrate to be processed or from a client device (20); a permit/reject judgment unit (13) which judges whether permission or rejection is to be made according to the judgment request information received by the judgment request information reception unit (12); and a judgment result information transmission unit (14) which transmits the judgment result information indicating the judgment result made by the permit/reject judgment unit (13), to the device has transmitted the judgment request information.</p>
申请公布号 KR20090118950(A) 申请公布日期 2009.11.18
申请号 KR20097018429 申请日期 2008.02.06
申请人 TOKYO ELECTRON LIMITED 发明人 SHIOYAMA NORIAKI;KOSHOJI YOSHIAKI
分类号 H01L21/02;G05B19/418;H01L21/00 主分类号 H01L21/02
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