发明名称 |
SERVER DEVICE, INFORMATION PROCESSING METHOD, AND PROGRAM |
摘要 |
<p>[PROBLEMS]To enable easy management of information on authority.[MEANS FOR SOLVING PROBLEMS]A server device (10) includes: an authority information storage unit (11) for storing authority information concerning authority for processing; a judgment request information reception unit (12) which receives judgment request information requiring a permit/reject judgment concerning execution of a desired process, which request is transmitted from a manufacturing device (40) for performing a predetermined semiconductor process on a substrate to be processed or from a client device (20); a permit/reject judgment unit (13) which judges whether permission or rejection is to be made according to the judgment request information received by the judgment request information reception unit (12); and a judgment result information transmission unit (14) which transmits the judgment result information indicating the judgment result made by the permit/reject judgment unit (13), to the device has transmitted the judgment request information.</p> |
申请公布号 |
KR20090118950(A) |
申请公布日期 |
2009.11.18 |
申请号 |
KR20097018429 |
申请日期 |
2008.02.06 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SHIOYAMA NORIAKI;KOSHOJI YOSHIAKI |
分类号 |
H01L21/02;G05B19/418;H01L21/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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