发明名称 |
Two-dimensional lattice calibrating device, two-dimensional lattice calibrating method, two-dimensional lattice calibrating program and recording medium |
摘要 |
<p>A two-dimensional lattice calibrating device includes: a measuring unit (2) that measures respective positions of marks (1a) for each of a plurality of measurement dispositions (n); a simultaneous-equations generating unit (5) that generates simultaneous equations for acquiring deviations (Di) of the plurality of marks (1a) using a coordinate relational equation and a least-squares conditional equation that sets least-squares lines that minimize the deviation (Di) of actual position (Li) of the marks (1a) based on measurement values (mni) as coordinate axes of artifact coordinates; and a simultaneous-equations calculating unit that solves the derived simultaneous equations.
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申请公布号 |
EP1995554(A3) |
申请公布日期 |
2009.11.18 |
申请号 |
EP20080156718 |
申请日期 |
2008.05.22 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
NARA, MASAYUKI;ABBE, MAKOTO |
分类号 |
G01B21/04 |
主分类号 |
G01B21/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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