DEVICE FOR SURFACE PROFILING

摘要

PURPOSE: An object shape measuring device is provided to measure information on a shape of an object by obtaining sufficient reflection light for measuring the shape of the object. CONSTITUTION: An object shape measuring device comprises a test unit(50), an interferometer(1) and a drive unit(55). The test unit accommodates a test material. The interferometer comprises an optical source part(10), a reflecting part(40), a splitter(20), and a sensor(30). The optical source part emits incident light. The reflecting part reflects the light. The splitter distributes the incident light to the test unit and the reflecting part. The splitter causes the interference of the light returned from the test unit and the reflecting part. The sensor senses the interference fringe of the test material. The drive unit rotates or moves on the test unit and the interferometer.