摘要 |
<p>An optical instrument includes a grating (200). The grating includes a plurality of plates (210) that form a single first plane. The instrument further includes a mirror surface (110) positioned adjacent to the grating. The mirror surface is positioned in a second plane filled with respect to the first plane by an angle (130). In an embodiment, the mirror surface is made of a substrate (120), a silicon wafer positioned on the substrate, and a mirror etch pit surface on the silicon wafer.
The sloped mirror can be used for generating an optical path difference in spectral analyzes.</p> |