发明名称 Microelectromechanical lamellar grating including sloped mirror for generating an optical path difference
摘要 <p>An optical instrument includes a grating (200). The grating includes a plurality of plates (210) that form a single first plane. The instrument further includes a mirror surface (110) positioned adjacent to the grating. The mirror surface is positioned in a second plane filled with respect to the first plane by an angle (130). In an embodiment, the mirror surface is made of a substrate (120), a silicon wafer positioned on the substrate, and a mirror etch pit surface on the silicon wafer. The sloped mirror can be used for generating an optical path difference in spectral analyzes.</p>
申请公布号 EP2120026(A1) 申请公布日期 2009.11.18
申请号 EP20090158882 申请日期 2009.04.27
申请人 HONEYWELL INTERNATIONAL INC. 发明人 HIGASHI, ROBERT E.
分类号 G01J3/453;G01B9/02;G02B5/08 主分类号 G01J3/453
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