发明名称 METHOD OF MANUFACTURING SOLID-STATE IMAGING DEVICE AND METHOD OF MANUFACTURING ELECTRONIC APPARATUS
摘要 PURPOSE: A method for manufacturing a solid imaging device and the method for manufacturing an electric device are provided to form an on-chip filter of the red, green, and blue by pattering a resist film. CONSTITUTION: A signal circuit is formed on a first surface of a semiconductor substrate forming a photoelectric converter though an interlayer insulation layer(14). The light is inputted from a second surface of the semiconductor substrate to the photoelectric converter. An on-chip color filter(19) and an on-chip micro lens(21a) are formed on the second surface to which the light is inputted. After forming the on-chip color filter and the on-chip micro lens, an opening is formed on a pad unit of the second surface to which the light is inputted.
申请公布号 KR20090117982(A) 申请公布日期 2009.11.17
申请号 KR20090037075 申请日期 2009.04.28
申请人 SONY CORPORATION 发明人 AKIYAMA KENTARO
分类号 H01L27/146;H01L27/14;H04N5/335;H04N5/365;H04N5/369;H04N5/3745 主分类号 H01L27/146
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