发明名称 Method for the production of a bipolar transistor comprising an improved base terminal
摘要 For the production of an improved bipolar transistor comprising a low-resistance base terminal, a dielectric layer is deposited over the semiconductor substrate and is highly doped via an implantation mask. In a subsequent controlled thermal step, the dopant is then indiffused into the semiconductor substrate from the dielectric layer serving as a dopant repository. This gives rise to a low-resistance region with which the extrinsic base can be defined carefully.
申请公布号 US7618871(B2) 申请公布日期 2009.11.17
申请号 US20050593141 申请日期 2005.01.19
申请人 AUSTRIAMICROSYSTEMS AG 发明人 MEINHARDT GERALD;KRAFT JOCHEN
分类号 H01L21/331 主分类号 H01L21/331
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