Semiconductor device having capacitors

摘要

A semiconductor device including at least one first capacitor and at least one second capacitor. The at least one first capacitor includes a first storage node having a cylindrical shape. The at least one second capacitor includes a lower second storage node having a hollow pillar shape including a hollow portion, and an upper second storage node having a cylindrical shape and extending upward from the lower second storage node.

主权项

1. A semiconductor device comprising:
a substrate; at least one first capacitor including a first storage node formed on the substrate and having a cylindrical shape; at least one second capacitor including a second storage node formed on the substrate, the second storage node having a lower second storage node having a hollow pillar shape including a hollow portion and an upper second storage node having a cylindrical shape and extending upward from the lower second storage node, and an insulating pillar filling a part of the hollow portion, wherein the upper second storage node has a concavely recessed bottom, wherein the lower second storage node is disposed on a first plane disposed apart from the substrate by a first distance, and wherein the upper second storage node is disposed on a second plane disposed apart from the substrate by a second distance that is greater than the first distance.