Vacuum seal arrangement useful in plasma processing chamber

摘要

A vacuum seal arrangement comprising a one-piece elastomeric gasket having at least first and second O-rings interconnected by a planar web, a first part having a first planar sealing surface with a dove-tail groove therein holding the first O-ring and a square walled groove therein holding the second O-ring, the first part further including at least one passage in the first planar sealing surface surrounded by the first O-ring or second O-ring.

主权项

1. A vacuum seal arrangement comprising:
a one-piece elastomeric gasket having at least first and second O-rings interconnected by a planar web; a first part having a first planar sealing surface with a dove-tail groove therein holding the first O-ring and a square walled groove therein holding the second O-ring, wherein the first and second O-rings are concentric and the square walled groove is radially inward of the dove tail groove with respect to the first planar sealing surface, the first part further including at least one passage in the first planar sealing surface surrounded by the first O-ring or second O-ring, wherein the passage opens into an inner portion of the square walled groove; and a second part attached to the first part; wherein
the second part has a passage in a second planar sealing surface;the passage in the second planar sealing surface is aligned with and in fluid communication with the passage in the first planar sealing surface; anda third part having a third planar sealing surface clamped against the second O-ring, wherein the third part surrounds the second part.