SUBSTRATE EXPANSION AND CONTRACTION CONDITIONS DISPLAY DEVICE, METHOD FOR DISPLAYING SUBSTRATE EXPANSION AND CONTRACTION CONDITIONS, AND INFORMATION RECORDING MEDIUM

摘要

PURPOSE: A substrate expansion/contraction condition display device, a method for displaying substrate expansion/contraction conditions, and an information recording medium are provided to enable a user to grasp the deformation of a substrate directly by visually displaying the misalignment of marks on a substrate. CONSTITUTION: A substrate expansion/contraction condition display device(162) comprises a first unit, a second unit, and a third unit. The first unit successively moves a substrate to match each center of marks installed on the substrate with a reference position. Every time the substrate moves, the second unit successively detects positional deviation between the reference position and the center of the mark. The third unit displays the expansion/contraction condition of the substrate based on the detected positional deviation.