发明名称 |
Beam current measuring instrument and beam current measuring method using same |
摘要 |
The invention provides a nondestructive measuring method and measuring apparatus that assures a high noise immunity and is capable of performing high-accuracy beam current measurements. The inventive beam current measuring apparatus includes a magnetism shielding part for shielding an external magnetic field and a magnetic field sensor arranged in the shielding space generated by said magnetism shielding part, said beam current measuring apparatus measuring, by using said magnetic field sensor, a magnetic field where a beam current to be measured is generated, characterized in that said magnetic field sensor has a magnetic flux/feedback current conversion coefficient of 8x10-15 Wb/A or above.
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申请公布号 |
US7619223(B2) |
申请公布日期 |
2009.11.17 |
申请号 |
US20040549251 |
申请日期 |
2004.03.12 |
申请人 |
PANASONIC CORPORATION;RIKEN |
发明人 |
SASAKI YUICHIRO;MIZUNO BUNJI;HATANAKA KICHIJI;KATAYAMA TAKESHI;WATANABE TAMAKI |
分类号 |
G01K1/08;G01R19/00;G01R33/035 |
主分类号 |
G01K1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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