发明名称 |
DISTORTION MEASUREMENT IMAGING SYSTEM |
摘要 |
A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement. |
申请公布号 |
KR20090117900(A) |
申请公布日期 |
2009.11.13 |
申请号 |
KR20097020001 |
申请日期 |
2008.02.26 |
申请人 |
CORNING INCORPORATED |
发明人 |
BERG DAVID;GOLLIER JACQUES;GOODMAN DOUGLAS S.;USTANIK CORREY R. |
分类号 |
G01B11/30;G01B9/02;G01N21/88 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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