| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation source which is configured to generate extreme ultraviolet rays. <P>SOLUTION: The radiation source includes: a plasma forming site located at a position where a laser radiation beam contacts fuel to form a plasma; a collector which collects the extreme ultraviolet rays formed in the plasma forming site, thereby forming an extreme ultraviolet ray beam; a contamination barrier having a plurality of foils at least part of which is located between the plasma forming site and the collector; and a rotatable base connected with the plurality of foils operatably. The rotatable base is so configured that the laser radiation beam passes through the contamination barrier and reaches the plasma forming site. <P>COPYRIGHT: (C)2010,JPO&INPIT |
