摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor which is usable, even in a high-temperature region. Ž<P>SOLUTION: This pressure sensor 10 includes a housing 20 fixed to a pipe for measurement; a connector case 30 with a specific heat smaller than that of the housing 20; a sensor element 44 for outputting an electrical signal, according to the deformation of a diaphragm 42 by the pressure of a medium to be detected, and an annular substrate 50 for generating an output signal, according to the electric signal. The sensor element 44 and annular substrate 50 are arranged in and cooling liquid W is filled into a cooling chamber Sc formed, by assembling the housing 20 to the connector case 30. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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