FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

PURPOSE: A fluid handing structure, a lithography apparatus, and a method for manufacturing a device are provided to increase a meniscus breakdown speed. CONSTITUTION: A fluid handling structure has a plurality of openings(50) arranged in a cornered shape(52) on the plane. The openings are orientated to the substrate or a substrate table to support the substrate. The cornered shape has a side with a negative radius and a corner with the radius between 0.05 and 4.0 mm.