发明名称 ELECTRONIC COMPONENT MOUNTING DEVICE, AND BONDING DEFECT DETECTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an electronic component mounting device and a bonding defect detection method by which bonding defects can be detected even for an object incapable of securing temperature uniformity in a plurality of electrodes in the electronic component mounting of bonding the plurality of electrodes at the same time. <P>SOLUTION: In a process of bonding a substrate 8 with a plurality of electrodes and an IC 7 with a plurality of electrodes by heat and pressure, a thermometer which measures substrate lower surface temperatures at a plurality of arbitrary positions is provided, so that a bonding defect during bonding can be precisely detected. Even when a plurality of ICs are press-bonded at the same time, bonding states can be individually comprehended, so that a bonding defect during bonding can be precisely detected. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009267178(A) 申请公布日期 2009.11.12
申请号 JP20080116521 申请日期 2008.04.28
申请人 PANASONIC CORP 发明人 FUJITA AKIRA;HOSOYA NAOTO
分类号 H01L21/60;H05K13/04 主分类号 H01L21/60
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