发明名称 CONTROL DEVICE AND CONTROL METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a control device and a control method for reducing a settling time between when the control is started and when a control target is set to a target value with simple configurations even when any control dead time is generated. Ž<P>SOLUTION: This control device is provided with: a first acquiring part 12 for acquiring a first value detected from a first temperature sensor 2: a second acquisition part 13 for acquiring a second value detected by a second temperature sensor 3 arranged near a control object in comparison with the first temperature sensor 2; a switching part 17 for switching an input value between the first value and the second value according to the result of comparing the second value with a preset target value; and a PID control part 16 for controlling the state of the control object on the basis of the deviation between the target value and the input value. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009265890(A) 申请公布日期 2009.11.12
申请号 JP20080113913 申请日期 2008.04.24
申请人 NIKON CORP 发明人 TOTSU MASAHIRO
分类号 G05B11/36;G05D23/19 主分类号 G05B11/36
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