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发明名称
VERFAHREN ZUR HERSTELLUNG VON ZUVERLÄSSIGEN CU-ZWISCHENVERBINDUNGEN
摘要
申请公布号
DE60233886(D1)
申请公布日期
2009.11.12
申请号
DE20026033886
申请日期
2002.11.08
申请人
ADVANCED MICRO DEVICES INC.
发明人
NGO, MINH VAN;HALLIYAL, ARVIND;PATON, ERIC
分类号
H01L21/3205;H01L21/768;H01L23/52;H01L23/522
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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