| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of surface treatment capable of preventing contamination on a backside of a substrate by hydrophobic treatment for improving adhesion between the substrate and resist. <P>SOLUTION: The surface treatment method for hydrophobic treatment of a surface of the substrate 1 on which the resist is to be applied to improve adhesion between the substrate 1 and the resist prevents vapor of a surface treatment agent 3 from being supplied to a backside of the substrate 1 when the vapor of the agent 3 for improving adhesion between the substrate 1 and the resist is supplied to the surface of the substrate 1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
