| 摘要 |
PURPOSE: A coating apparatus is provided to improve precision by stabilizing a gap between a substrate and a coater and to prevent cracks at the rear side of the substrate without sliding between a substrate and backing roll or transfer conveyor. CONSTITUTION: A coating apparatus comprises a coater for applying the coating solution on a substrate(P); a backing roll(5) which is arranged at a position faced with a coater, has a suction hole(7) in the outer circumference, and absorbs and returns a substrate; and return rollers(6a,6b) which returns a substrate toward the upper side and lower side of the backing roll. |
