ULTRASONIC GENERATOR AND WAFER CLEANING APPARATUS COMPRISING THE SAME

摘要

PURPOSE: An ultrasonic generator and a substrate cleaning apparatus including the same are provided to remove various particles by generating an ultrasound wave with different frequency. CONSTITUTION: An ultrasonic generator includes a disk shaped piezoelectric element(310) and an electrode. The electrode is formed in the upper side and the lower side of the piezoelectric element and supplies the current to the piezoelectric element. The piezoelectric element is comprised of the pattern in which the different thickness parts are repeated and generates the ultrasonic energy with the various frequencies according to the thickness.