| 摘要 |
PURPOSE: A wafer blade is provided to transfer a wafer to an accurate position by arranging the wafer on the wafer blade accurately. CONSTITUTION: A wafer blade(100) includes a support plate(10), a moveable unit(20), a roller(30), and a stopper(40). The wafer is received and supported in the support plate. The movable unit is arranged to move linearly with regard to the wafer. The roller is rotatably combined in the movable unit and pressurizes the wafer to move to the reference position. The stopper is combined in the support plate and is contacted with the wafer to limit the movement to the pressurization direction of the wafer in a pressurization process by a roller.
|
