| 摘要 |
PURPOSE: A substrate fixing apparatus is provided to prevent deflection of a substrate by selectively heating a specific part of the substrate according to a size of the substrate. CONSTITUTION: A substrate fixing apparatus includes a main body(2), a heater(4), two fixing bars(10), and two substrate fixing parts(12). The heater is arranged inside the main body. The heater is divided into five cells. The fixing bars are fixed in a left end and a right end of a top surface of the main body. A concave groove is formed in each fixing bar into a longitudinal direction. One of the two substrate fixing parts includes a guide(18). A concave part is formed in a left end and a right end of the guide. The other one of the two substrate fixing parts includes a guide(18a) and a guide bar(22). The guide bar is installed in the guide by a bracket.
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