| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the productivity of a compact meandering oscillator. <P>SOLUTION: The meandering oscillator is composed of: a plurality of oscillating plates which are folded and connected; and piezoelectric actuators 8 arranged on every one piece wherein the piezoelectric actuators 8 have lower electrodes 9, a piezoelectric body 10 and an upper electrode 11 which are laminated in this order on the oscillating plates. Thus, even if the element is reduced in size, an electrode layout is facilitated, and as a result, productivity is improved. <P>COPYRIGHT: (C)2010,JPO&INPIT |
