SENSOR ELEMENT USING NANO-STRUCTURE, ANALYZING CHIP, ANALYZER, METHOD FOR MANUFACTURING SENSOR ELEMENT AND ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a sensor element having a nano-structure exposed in a flow channel, capable of being simply formed, keeping reliability high, and performing detection of high capacity. SOLUTION: The sensor element 1 has a substrate 2 having a surface provided with a groove part 5 and the silicon nano-wire 3 provided in the groove part 5 so as to span both sidewalls of the groove part 5 and integrally constituted along with the substrate 2. The silicon nano-wire 3 is spaced apart from the base of the groove part 5. COPYRIGHT: (C)2010,JPO&INPIT