发明名称 ULTRASONIC VIBRATION BONDING RESONATOR AND SUPPORTING DEVICE FOR SUPPORTING IT
摘要 <P>PROBLEM TO BE SOLVED: To provide a simple structure in which an ultrasonic vibration bonding resonator is supported by a supporting device. Ž<P>SOLUTION: A bottom portion of an output member 5 of a pressurization mechanism 4 moves up and down in a work space 2. A supporting device 6 is provided under the output member 5, a resonance body 9 of a resonator 8 is positioned in a housing space 11 of the supporting device 6, and the bottom portion of the output member 5 moves up and down in the work space 2. Four support portions 10 of the resonator 8 are separately supported by eight holding portions 7 of the supporting device 6 in such a manner that one suppor portion 10 is vertically sandwiched between one vertical pair of cylindrical holding portions 7. The upper holding portions 7 are in contact with upper horizontal surfaces of the support portions 10 while the lower holding portions 7 are in contact with lower inclined surfaces of the support portions 10, and the lower holding portions 7 respectively press the support portions 10 inwardly, thereby preventing the resonator 8 from deviating laterally. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009267265(A) 申请公布日期 2009.11.12
申请号 JP20080117796 申请日期 2008.04.28
申请人 ARUTEKUSU:KK 发明人 SATO SHIGERU;KAMIYA MAYUMI;KATSUMI MITSUGI;ISHII RYOICHI
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
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