| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor laser module, in which the deviation of at least an optical axis for monitoring can be reduced. Ž<P>SOLUTION: Bases 4, 5 as a plurality of plate members of more than two layers which differ in the expansion coefficient are superimposed on each other, on the top of a Peltier element 2 located on the bottom of a case 20. Then, a suppressing member 22, with an expansion coefficient different from that of the base 5 on the top layer, is further formed on a part area of the base 5, at least on the top layer, to set an optical element on the base 5 and/or the suppressing member 22. Even when warpage is about to occur in the Peltier element 2, a plywood structure formed by the base 4, base 5, and the suppression member 22 prevents the warpage from occurring; accordingly, it becomes difficult to have warpage occur in the base 4 and the suppression member 22; and deviation in the optical axis becomes more difficult to occur between a beam splitter 8 and an etalon 9. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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