| 摘要 |
<p>Disclosed are: an imprint mold which is characterized in that a coating layer provided on the surface of the mold is hardly detached from the mold; and a method for producing the imprint mold. Specifically disclosed are: an imprint mold comprising a main body of the mold and a coating layer comprising a mold release agent and provided on the surface of the main body, wherein the mold release agent comprises a compound represented by the formula (1); and a method for producing the imprint mold. Wherein R represents Rf-X-, provided that two R's are the same as each other; Rf represents a perfluoroalkyl group; X represents a group composed of one or more units selected from-(OC3F6)-,-(OC2F4)-and-(OCF2)-, wherein the total number of the units is 1 or more; Y represents an organic group; n represents a number of 2 to 10 on average; Z represents-Si(R1)m(R2)3-m; R1 represents a hydroxy group or a hydrolyzable group; R2 represents a hydrogen atom or a hydrocarbon group; and m represents a number of 1 to 3.</p> |
