| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor that suppresses stress causing fluctuation in pressure other than measuring object pressure, and hardly causes output characteristic variation of the pressure sensor. SOLUTION: A pressure sensor includes at least a semiconductor substrate 11, a first cavity portion 12 that spreads out on one surface 11a of the semiconductor substrate 11 approximately parallel with one surface 11a in the interior of a central region α thereof, a diaphragm portion 13 of a thin plate shape that is positioned on one side of the first cavity portion 12, a pressure sensitive element 14 that is disposed on the diaphragm 13, and a bump 15 that is disposed in an outer edge region β of the one surface 11a of the semiconductor substrate 11 that excludes the diaphragm portion 13 and is electrically connected with the pressure sensitive element 14, and a second cavity portion 16 that is disposed in at least one portion of the outer edge region β in the interior of the semiconductor substrate 11 and is closed with respect to the one surface 11a of the semiconductor substrate 11. COPYRIGHT: (C)2010,JPO&INPIT
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