| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a movable mechanism for a stage with simple and low-cost structure, wherein a stage face to a base part can be moved in the vertical direction, the pitching direction, and the rolling direction and is strongly restricted in the other degrees of freedom and wherein there is a small amount of a dynamic load to an actuator. Ž<P>SOLUTION: Dogleg support mechanisms 30-33 each having one joint part are configured by using spring material such as a plate spring or a bent bar spring such that a direction permitted with elastic deformation of material having a spring property is utilized, and this stage movable mechanism bringing the degrees of freedom is configured by using two or more support mechanisms and elastically connecting the stage 10 and the base part 20. Simultaneously, when the support mechanism is elastically deformed by forming a dogleg, a reverse bias property such that reaction force against displacement increase is constant or reduced is brought to improve an operation service life when using the actuator. By combining the stage movable mechanism with a sensor device, a three-degree-of-freedom operation detection device is materialized. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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