发明名称 |
PHOTOIRRADIATION APPARATUS, CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, AND DEVICE |
摘要 |
A photoirradiation apparatus includes an optical modulation element which phase-modulates light, an illumination system to illuminate the optical modulation element, and an imaging optical system which applies the phase-modulated light to a non-single-crystal semiconductor film to form a predetermined light intensity distribution with a strip-like repetitive region having long sides adjacent to each other. The light intensity distribution has a distribution which is downwards convex along a center line in a short side direction and a center line in a long side direction of the repetitive region. The light intensity distribution includes isointensity lines each bent to form a projection from a center of the repetitive region outward in the long side direction. A radius of curvature of an end of at least one isointensity line is not more than 0.3 mum. A pitch of the repetitive region in the short side direction is not more than 2 mum.
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申请公布号 |
US2009278060(A1) |
申请公布日期 |
2009.11.12 |
申请号 |
US20090417838 |
申请日期 |
2009.04.03 |
申请人 |
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发明人 |
TANIGUCHI YUKIO;MATSUMURA MASAKIYO;ENDO TAKAHIKO;AZUMA KAZUFUMI |
分类号 |
G21K5/00 |
主分类号 |
G21K5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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