PROCESS SUBSTRATE WITH CRYSTAL ORIENTATION MARK, METHOD OF DETECTING CRYSTAL ORIENTATION, AND READING DEVICE OF CRYSTAL ORIENTATION MARK

摘要

To provide a crystal orientation mark which can be formed easily and inexpensively, and which enables to perform high precision alignment and allows information other than crystal orientation to be included, even for a small diameter process substrate. A crystal orientation mark is drawn on the surface of the process substrate. The crystal orientation mark includes a marking region for crystal orientation detection, and a marking region for information. The marking region for crystal orientation detection is provided at two locations in an outer edge portion of the process substrate to be used for the alignment of the process substrate. The marking region for information is provided on a straight-line region connecting the marking regions for crystal orientation detection at the two locations, and includes a pattern for demonstrating predetermined information relating to the process substrate.

主权项

1. A process substrate with crystal orientation mark, comprising a marking that includes:
a marking region for crystal orientation detection which is provided at two locations on an outer edge portion of the process substrate to determine an in-plane crystal axis of the process substrate; and a marking region for information which is provided on a straight-line region connecting the marking regions for crystal orientation detection at the two locations, and in which a pattern to demonstrate predetermined information relating to the process substrate is formed.