发明名称 CONSTRAINED DIE ADHESION CURE PROCESS
摘要 A clamping apparatus applies a force to a workpiece during processing. The clamping apparatus includes a base defining a work area configured to receive a joined structure having multiple elements. The base defines a recess in the work area. An adjustable mechanism is configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process. A resilient plunger is part of the adjustable mechanism. The resilient plunger extends downwardly from a top plate of the adjustable mechanism, and the resilient plunger is configured to contact a top of a first element of the joined structure to apply the downward force.
申请公布号 US2016211161(A1) 申请公布日期 2016.07.21
申请号 US201615084893 申请日期 2016.03.30
申请人 GLOBALFOUNDRIES Inc. 发明人 Blackshear Edmund;Khanna Vijayeshwar D.;Mantilla Oswald J.
分类号 H01L21/687;H01L21/67 主分类号 H01L21/687
代理机构 代理人
主权项 1. (canceled)
地址 Grand Cayman KY