METHOD OF FABRICATING MICROSCALE OPTICAL STRUCTURES

摘要

A method (100) for manufacturing a microscale optical structure (405) from a wafer (1110), including: preparing (105) the wafer (1110) with coatings (1120) of desired optical properties by depositing the coatings (1120) on an optically finished surface (1125) of the wafer (1110); mounting (110) the wafer (1110) on a supporting base (1115) having a releasable medium, with the optically finished surface (1125) adjacent the supporting base (1115) to protect the optically finished surface (1125); forming (115) additional surfaces of the optical structure (405) at a desired angle (415) and depth (420) using a grinding blade (210) having a cutting face (410) at the angle (415), the grinding blade (210) being configured to rotate about an axis (275); and polishing (120) the additional surfaces of the optical structure (405) by introducing a polishing material onto the wafer (1110) and using a polishing means to smooth the additional surfaces.