CHAMBER DEVICE AND ALIGNMENT LAMINATION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a chamber device capable of increasing the seal effect between camber parts. SOLUTION: In the chamber device, a pair of openable and closable lower and upper chamber constituting members 43 and 44 are superimposed to form a chamber 50 in the lower and upper chamber constituting members 43 and 44. In each of the lower and upper chamber constituting members 43 and 44, a plurality of O-rings 53 provided side by side in parallel, so as to make one round of the circumference of the chamber 50 are provided so as to come into contact with each other when the lower and upper chamber constituting members 43 and 44 are superimposed. Suction holes 54 for the vacuum suction of hermetically sealed areas 60a and 60b surrounded by the O-rings 53 being in contact with each other are provided between the respective O-rings 53. COPYRIGHT: (C)2010,JPO&INPIT