发明名称 MICROELECTROMECHANICAL LAMELLAR GRATING
摘要 An optical instrument includes a grating. The grating includes a plurality of plates that form a single first plane. The instrument further includes a mirror surface positioned adjacent to the grating. The mirror surface is positioned in a second plane. In an embodiment, the mirror surface is made of a substrate, a silicon wafer positioned on the substrate, and a mirror etch pit surface on the silicon wafer.
申请公布号 US2009279172(A1) 申请公布日期 2009.11.12
申请号 US20080119184 申请日期 2008.05.12
申请人 HIGASHI ROBERT E 发明人 HIGASHI ROBERT E.
分类号 G02B5/18;G02B27/44 主分类号 G02B5/18
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