发明名称 |
IN-SITU DIFFERENTIAL SPECTROSCOPY |
摘要 |
A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array. |
申请公布号 |
WO2009137706(A2) |
申请公布日期 |
2009.11.12 |
申请号 |
WO2009US43185 |
申请日期 |
2009.05.07 |
申请人 |
KLA-TENCOR CORPORATION;VAEZ-IRAVANI, MEHDI;NASSER GHODSI, MEHRAN;ZHAO, GUOHENG |
发明人 |
VAEZ-IRAVANI, MEHDI;NASSER GHODSI, MEHRAN;ZHAO, GUOHENG |
分类号 |
G01J3/00;G01J3/42 |
主分类号 |
G01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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