发明名称 THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PURPOSE: A thin film transistor and a method for manufacturing the same are provided to reduce a manufacturing cost and improve productivity using the metal oxide with high quality as an active layer without resetting a target. CONSTITUTION: A thin film transistor includes a metal oxide active layer(230), a gate electrode(210), a gate insulation layer(220), a source electrode(250), and a drain electrode(260). The gate electrode is partially overlapped in a metal oxide active layer. The gate insulation layer is prepared between the metal oxide active layer and the gate electrode. The source and drain electrodes are partially connected to the metal oxide active layer.</p>
申请公布号 KR20090117543(A) 申请公布日期 2009.11.12
申请号 KR20080043644 申请日期 2008.05.09
申请人 JUSUNG ENGINEERING CO., LTD.;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 PARK, JAE WOO;JEON, NAM HO;YOO, SEUNG HYUP;LEE, HYUNG SUP;KIM, CHUL HWAN;LEE, KYOO HWAN
分类号 H01L29/786 主分类号 H01L29/786
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