发明名称 MULTIPLE SURFACE INSPECTION SYSTEM AND METHOD
摘要 PURPOSE: A multi surface inspecting system and a method thereof are provided to have high definition and include image data from each surface by using prisms. CONSTITUTION: A multi surface inspecting system(100) comprises a prism structure, an image data system and a light assembly. The prism structure is arranged at the lower part of an inspected component path. The image data system is arranged at the lower part of the prism structure. The light assembly comprises: a first light source for irradiating multiple sides of the components to be inspected; and a second light source for irradiating the bottom of the components to be inspected. The light assembly comprises a channel surrounding the inspected component path. The prism structure comprises a plurality of prisms(104).
申请公布号 KR20090117660(A) 申请公布日期 2009.11.12
申请号 KR20090040375 申请日期 2009.05.08
申请人 SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS PTE LTD. 发明人 AMANULLAH AJHARALI;GE HAN CHENG;TAN HUEK CHOY;LAI HING TIM
分类号 G01N21/89;G01B11/30;G02B5/04 主分类号 G01N21/89
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