| 发明名称 |
OPTICAL MEMBER, LIGHT SOURCE DEVICE AND INSPECTING DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical member, preventing a reflecting mirror of a light source device from being tarnished without requiring specific facility. <P>SOLUTION: The optical member includes: a support part (a transparent glass 16a); a reflecting part 16b supported by the support part and reflecting light 14b having a desired wavelength (e.g. ultraviolet ray light to visible light ray); and a heat ray reflecting part 16c supported by the support part, reflecting at least light 14c having a wavelength other than the desired wavelength toward the reflecting part to heat the reflecting part. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| 申请公布号 |
JP2009265383(A) |
申请公布日期 |
2009.11.12 |
| 申请号 |
JP20080115375 |
申请日期 |
2008.04.25 |
| 申请人 |
NIKON CORP |
发明人 |
INOUE TAKESHI;YAMADA MASAYUKI |
| 分类号 |
G02B5/08;F21S2/00;F21V7/00;F21Y101/00;G02B5/10;H01L21/027 |
主分类号 |
G02B5/08 |
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