摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic electroluminescent element capable of forming an organic functional layer uniform in film thickness by using a coating method capable of forming a coating uniform in film thickness by reducing the distance from the coating start to a point with film thickness set constant; and an organic electroluminescent element manufactured by the manufacturing method. SOLUTION: This manufacturing method of an organic EL element is used for manufacturing an organic EL element by laminating, on a substrate, at least a positive electrode, a negative electrode, and one or more organic functional layers located between the positive electrode and the negative electrode. The manufacturing method includes a process of bringing a nozzle arranged by directing a slit upward close to a substrate from the lower side in a state where a coating liquid containing a material becoming the organic functional layer(s) is pushed out from the nozzle, and forming coatings by relatively moving the nozzle and the substrate with the coating liquid adhered to the substrate side to form the organic functional layers, wherein the rise velocity of the nozzle is 0.7 m/min in bringing the nozzle close to the substrate from the lower side. COPYRIGHT: (C)2010,JPO&INPIT
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