摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nanopore film, method of manufacturing the same and use of the same. Ž<P>SOLUTION: In the method of manufacturing the nanopore film, photolithography is used in combination with colloidal lithography to manufacture pores with a nanosize in a short time on a large scale. The resulting pores of the nanopore film have a narrow size distribution and are arranged at random. Further, the distance between the pores does not show substantial change. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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