Flow or eddy sensor for measurement of vector speed, has hot wire sensor element micro-manufactured on substrate for measurement of component of flow or cyclic field of fluid

摘要

The flow or eddy sensor has a hot wire sensor element (10) micro-manufactured on a substrate (20) for measurement of component of a flow or a cyclic field of a fluid. Another hot wire sensor element is provided, which is micro-manufactured on substrate, which is arranged at firm angle to former hot wire sensor element, over another component of flow or cyclic field. The wire elements (26) are provided, which is made of polycrystalline semiconductor material, particularly polycrystalline silicon, or a metallic film, particularly platinum, a platinum rhodium alloy, tungsten or gold.