发明名称 PLASMA DISPLAY PANEL
摘要 <p>A method for manufacturing a plasma display panel including a protective film layer having a higher secondary discharge coefficient by improving the condition that an inert film layer is not discharged at a low voltage and is easily sputtered by reviewing the condition from a viewpoint different from that of a material. An inert film layer (31) is formed on a protective film layer (3) of a front glass substrate-side module (10). A photoresist layer (32) is formed on the inert film layer (31) and the photoresist layer (32) in a required portion is removed. By exposing part of the protective film layer by dry etching after the removal, the protective film layer having a higher secondary discharge coefficient can be formed.</p>
申请公布号 WO2009136433(A1) 申请公布日期 2009.11.12
申请号 WO2008JP58479 申请日期 2008.05.07
申请人 HITACHI, LTD.;HASEGAWA, MINORU;FUKUTA, SHINYA 发明人 HASEGAWA, MINORU;FUKUTA, SHINYA
分类号 H01J9/02;H01J11/12;H01J11/40 主分类号 H01J9/02
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