| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a correcting apparatus that accurately detects remaining defects by using information relating to height and that automatically corrects remaining defects as necessary. <P>SOLUTION: An image processor 12 detects a defect on the basis of a defect image which is obtained by picking up an image of a glass substrate 2 by an imaging section 11, and recognizes a position and an area of the defect. A laser oscillator 14 outputs a laser beam for correcting the detected defect. The laser beam is subjected to spatial light modulation by a DMD (Digital Micromirror Device) unit 17 so that the defect is irradiated with the laser beam. A driver 20 for driving the DMD unit 17 is controlled by a laser shape control section 19 for outputting a control signal based on the data output from the image processor 12. A remaining defect detecting section 22 acquires height information relating to the height of the glass substrate 2 in the area of the defect, deciding presence/absence of the remaining defect to be further corrected after the correction of the defect on the basis of the height information. If the presence of the remaining defect is decided, laser irradiation is performed on the remaining defect in the same manner as laser irradiation on a defect. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
